Development of PECVD SiC for MEMS using 3MS as the precursor

Materials Research Society Symposium Proceedings

Volumn 911, Issue , 2006, Pages 283-288

  Du, Jiangang ^a   Singh, Neha ^a   Summers, James B ^a   Zorman, Christian A ^a  

^a Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; HARDNESS; HYDROGENATION; INDENTATION; MICROELECTROMECHANICAL DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

COMPOSITIONAL ANALYSIS; DEPOSITION PARAMETERS; MICROMACHINED BRIDGES; NANOINDENTATION; ORGANOSILANE;

SILICON CARBIDE;

EID: 33750370797     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-0911-b05-28     Document Type: Conference Paper

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