A high-performance positive-working photosensitive polyimide: Effects of reactive end groups on the physical properties of the films

Journal of Applied Polymer Science

Volumn 102, Issue 3, 2006, Pages 2180-2188

  Jung, Myung Sup ^a,b   Joo, Won Jae ^a   Kwon, Ohyun ^a   Sohn, Byung H ^a   Jung, Hee Tae ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Photolithography; Photosensitive polyimide; Reactive end capper

Indexed keywords

MOLECULAR WEIGHT; PHOTOLITHOGRAPHY; PHOTOSENSITIVITY; POLYIMIDES; PROBABILITY DENSITY FUNCTION; RING OPENING POLYMERIZATION; SYNTHESIS (CHEMICAL);

IMIDIZATION; PHOTOSENSITIVE POLYIMIDE; REACTIVE END CAPPER; STRESS BUFFER LAYERS;

PLASTIC FILMS;

FILM; MECHANICAL PROPERTY; PHYSICAL PROPERTY; POLYIMIDE; POLYMERIZATION; SYNTHESIS; THERMAL PROPERTY;

EID: 33750321734     PISSN: 00218995     EISSN: 10974628     Source Type: Journal    
DOI: 10.1002/app.24263     Document Type: Article

References (31)

1. Horie, K.; Yamashita, T. Photosensitive Polyimides, Fundamentals and Applications; Technomic: Lancaster, 1995.
2. Culver, R. Solid State Technol 1997, 40, 151.
3. Prack, E.; Tran, Z.; Franklin, C.; Tanner, S.; Murray, D. O. Adv Electron Packag 1997, 1, 1141.
4. Flack, W. W.; Flores, G. E.; Christensen, L.; Newman, G. Proc SPIE 1996, 2726, 169.
5. Hsu, S. L.-C.; Lee, P.; King, J. S.; Jeng, J. L. J Appl Polym Sci 2002, 86, 352.
6. Hsu, S. L.-C.; Lee, P.; King, J. S.; Jeng, J. L. J Appl Polym Sci 2003, 90, 2293.
7. Ho, B.-C.; Chen, J.-H.; Perng, W. C.; Lin, C. L.; Chen, L. M. J Appl Polym Sci 1998, 67, 1313.
8. Jin, Q.; Yamashita, T.; Horie, K. J Polym Sci Part A: Polym Chem 1994, 32, 503.
9. Chen, H.; Yin, J. J Polym Sci Part A: Polym Chem 2004, 42, 1735.
10. Ahne, H.; Leuschner, R.; Rubner, R. Polym Adv Technol 1993, 4, 217.
11. Ree, M. H.; Nunes, T. L.; Chen, K. J. R. J Polym Sci Part B: Polym Phys 1995, 33, 453.
12. Yoneda, Y.; Mizutani, D.; Ishiduki, Y.; Yokouchi, K. J Photopolym Sci Technol 1996, 9, 323.
13. Jung, M. S.; Lee, S. K.; Hyeon-Lee, J.; Park, M. K.; Jung, H. T. J Polym Sci Part A: Polym Chem 2005, 43, 5520.
14. Jung, M. S.; Seo, S. J. (to Samsung Electronics Co.). U.S. Pat 6,541,178 (2003).
15. Becke, A. D. J Chem Phys 1993, 98, 5648.
16. Koch, W.; Holthausen, M. C. A Chemist's Guide to Density Functional Theory; Wiley: New York, 2000.
17. Parr, R. G.; Yang, W. Density Functional Theory of Atoms and Molecules; Oxford University Press: Oxford, 1989.
18. Cramer, C. J. Essentials of Computational Chemistry: Theories and Models; Wiley: New York, 2001.
19. Bacon, A. D.; Zerner, M. C. Theor Chim Acta 1979, 53, 21.
20. Frisch, M. J.; Trucks, G. W.; Schlegel, H. B.; Scuseria, G. E.; Robb, M. A.; Cheeseman, J. R.; Zakrzewski, V. G. et al. Gaussian 98 Release Notes Rev. A. 9; Gaussian: Pittsburgh, PA, 1998.
21. Bertholio, F. B.; Mison, P.; Pascal, T.; Sillion, B. High Perform Polym 1993, 5, 47.
22. Kubota, S.; Yamawaki, Y.; Moriwaki, T.; Eto, S. Polym Eng Sci 1989, 29, 950.
23. Omote, T.; Mochizuki, H.; Koseki, K.; Yamaoka, T. Macromolecules 1990, 23, 4796.
24. Seino, H.; Haba, O.; Ueda, M.; Mochizuki, A. Polymer 1999, 40, 551.
25. Torrecillas, R.; Regnier, N.; Mortaigne, B. Polym Degrad Stab 1996, 51, 307.
26. Chisholm, M. S.; Dewar, W. S.; Smith, D. M. J Mater Chem 1995, 5, 947.
27. Hu, A. J.; Hao, J. Y.; Yang, S. Y. Macromolecules 1999, 32, 8046.
28. Wong, A. C.; Ritchey, W. M. Macromolecules 1981, 14, 825.
29. Wong, A. C.; Garroway, A. N.; Ritchey, W. M. Macromolecules 1981, 14, 832.
30. Stenchenberger, H. D. In Polyimides; Wilson, D., Stenchenberger, H. D., Hergenrother, P. M., Eds.; Blackie: London, 1993; Chapter 4.
31. Coburn, J. C.; Pottiger, M. T. In Polyimides: Fundamentals and Applications; Ghosh, M. K., Mittal, K. L., Eds.; Marcel Dekker: New York, 1996; Chapter 8.