Application of photosensitive polyimide to multichip module (MCM-D)

Journal of Photopolymer Science and Technology

Volumn 9, Issue 2, 1996, Pages 323-332

  Yoneda, Yasuhiro ^a   Mizutani, Daisuke ^a   Ishiduki, Yoshikatsu ^a   Yokouchi, Kishio ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343191238     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.9.323     Document Type: Article

References (5)

1. R. Yokota, R.Horiuchi, M.Kochi, C.Takahashi, H.Soma, I.Mita, Polyimides: Materials, Chemistry and Characterization, Eisevier, Amsterdam (1989) 13.
2. F.W. Harris, S.L.C.Hsu, C.J.Lee, F.Arnold, S.Z.D.Cheng, Mat. Res. Soc. Symp. Proc., 227 (1991) 3.
3. T. Takizawa, H.Suzuki, H.Satou, O.Miura, K.Miyazaki, Polym. Mater. Sei. Eng.(Prepr.), 66 (1992) 283.
4. R.F. Saraf, J.M.Roldan, T.D, IBM J. Res. Dev., 38 (1994) 441.
5. A.M. Spool, IBM J. Res. Dev., 38 (1994) 391.