Passive contact force and active opening force electrostatic switches for soft metal contact materials

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 162-165

  Oberhammer, Joachim ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; COMPUTER SIMULATION; ELECTRIC CONTACTS; ELECTROSTATIC ACTUATORS; ELECTROSTATICS;

ADHESION FORCE; ELECTROSTATIC SWITCHES; METAL CONTACTS; SOFT METALS;

ELECTRIC SWITCHES;

EID: 33750137670     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. H. F. Schlaak, "Potentials and limits of micro-electromechanical systems for relays and switches," in Proc. Int. Conf. on Electrical Contacts, Zurich, Switzerland, Sept. 9-12, 2002, pp. 19-30.
2. J. Schimkat, "Contact measurement providing basic design data for microrelay actuators," Sensors and Actuators A: Physical, vol. 73, no. 1-2, pp. 138-143, Mar. 1999.
3. D. Hyman and M. Mehregany, "Contact physics of gold microcontacts for MEMS switches," IEEE Trans. on Components and Packaging Technology, vol. 22, no. 3, pp. 357-364, Sept. 1999.
4. S. Majumder et al., "Study of contacts in an electrostatically actuated microswitch," in Proc. IEEE Electrical Contacts, Arlington, VA, USA, Oct. 26-28, 1998, pp. 127-132.
5. I. Schiele and B. Hillerich, "Comparison of lateral and vertical switches for application as microrelays," Journal of Micromechanics and Microengineering, vol. 9, no. 2, pp. 146-150, June 1999.
6. E. J. J. Kruglick and K. S. J. Pister, "Lateral MEMS microcontact considerations," IEEE Journal of Microelectromechanical Systems, vol. 8, no. 3, pp. 264-271, Sept. 1999.
7. L. L. Mercado, S.-M. Koo, T.-Y. T. Lee, and L. Liu, "A mechanical approach to overcome RF MEMS switch stiction problem," in Proc. IEEE Electronic Components and Technology Conference 2003, New Orleans, LA, USA, May 27-30, 2003, pp. 377-384.
8. R. Legtenberg, J. Gilbert, S. Senturia, and M. Elwenspoek, "Electrostatic curved electrode actuators," IEEE Journal of Microelectromechanical Systems, vol. 6, no. 3, pp. 257-265, Sept. 1997.
9. J. Oberhammer, M. Tang, A. Q. Liu, and G. Stemme, "Mechanically tri-stable in-line single-pole-double-through all-metal switch," in Proc. IEEE Micro Electr Mechanical Systems 2006, Istanbul, Turkey, Jan. 22-26, 2006.
10. P. M. Zavracky, N. E. McGruer, R. H. Morrison, and D. Potter, "Microswitches and microrelays with a view toward microwave applications," Int. Journal of RF and Microwave Computer-Aided Engineering, vol. 9, no. 4, pp. 338-347, July 1999.
11. D. Hyman, A. Schmitz, B. Warneke, T. Y. Hsu, Y. Lam, J. Brown, J. Schaffner, A. Walston, R. Y. Loo, G. L. Tangonan, M. Mehregany, and J. Lee, "Surface micromachined RF MEMS switches on GaAs substrates," Int. Journal of RF and Microwave Computer-Aided Engineering, vol. 9, no. 4, pp. 348-361, July 1999.
12. T. Seki, S. Sato, T. Masuda, I. Kimura, and K. Imanaka, "Low-loss RF MEMS metal-to-metal contact switch with CSP structure," in Proc. Transducers 2003, Boston, MA, USA, June 8-12, 2003, pp. 340-341.