Mechanically tri-stable in-line single-pole-double-throw all-metal switch

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 898-901

  Oberhammer, J ^a   Tang, M ^b,c   Liu, A Q ^b   Stemme, G ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; ELECTRODES; ELECTROSTATIC ACTUATORS; STICTION;

IN-LINE SWITCHES; MECHANICAL INTERLOCKING; SILICON-ON-GLASS PROCESSES; SINGLE-POLE-DOUBLE-THROW CONFIGURATION (SPDT);

ELECTRIC SWITCHES;

EID: 33750009555     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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