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Volumn 18, Issue 21, 2006, Pages 2203-2205

Self-aligned microlens-integrated vertical-cavity surface-emitting lasers

Author keywords

Digital alloy; Microlens; Selective oxidation; Vertical cavity surface emitting laser (VCSEL)

Indexed keywords

ALUMINUM ALLOYS; MICROLENSES; OXIDATION;

EID: 33750068814     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2006.884274     Document Type: Article
Times cited : (11)

References (12)
  • 2
    • 0036656745 scopus 로고    scopus 로고
    • "Microoptical two-dimensional devices for the optical memory head of an ultrahigh data transfer rate and density system using a vertical cavity surface emitting laser (VCSEL) array"
    • K. Goto, Y. Kim, S. Mitsugi, K. Suzuki, K. Kurihara, and T. Hribe, "Microoptical two-dimensional devices for the optical memory head of an ultrahigh data transfer rate and density system using a vertical cavity surface emitting laser (VCSEL) array," Jpn. J. Appl. Phys., vol. 41, pp. 4835-4840, 2002.
    • (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 4835-4840
    • Goto, K.1    Kim, Y.2    Mitsugi, S.3    Suzuki, K.4    Kurihara, K.5    Hribe, T.6
  • 4
    • 0031073871 scopus 로고    scopus 로고
    • "Fabrication of refractive microlenses in semiconductors by mask shape transfer in reactive ion etching"
    • E. M. Strzelecka, G. D. Robinson, L. A. Coldren, and E. L. Hu, "Fabrication of refractive microlenses in semiconductors by mask shape transfer in reactive ion etching," Microelectron. Eng., vol. 35, pp. 385-388, 1997.
    • (1997) Microelectron. Eng. , vol.35 , pp. 385-388
    • Strzelecka, E.M.1    Robinson, G.D.2    Coldren, L.A.3    Hu, E.L.4
  • 5
    • 0035333591 scopus 로고    scopus 로고
    • "Integration of microdiffractive lens with continuous relief with vertical-cavity surface-emitting lasers using focused ion beam direct milling"
    • May
    • Y. Fu, "Integration of microdiffractive lens with continuous relief with vertical-cavity surface-emitting lasers using focused ion beam direct milling," IEEE Photon. Technol. Lett., vol. 13, no. 5, pp. 424-426, May 2001.
    • (2001) IEEE Photon. Technol. Lett. , vol.13 , Issue.5 , pp. 424-426
    • Fu, Y.1
  • 7
    • 33750063513 scopus 로고    scopus 로고
    • "Microlens fabrication by selective oxidation of composition-graded digital alloy AlGaAs"
    • Jan. 1
    • K. S. Chang, Y. M. Song, and Y. T. Lee, "Microlens fabrication by selective oxidation of composition-graded digital alloy AlGaAs," IEEE Photon. Technol. Lett., vol. 18, no. 1, pp. 121-123, Jan. 1, 2006.
    • (2006) IEEE Photon. Technol. Lett. , vol.18 , Issue.1 , pp. 121-123
    • Chang, K.S.1    Song, Y.M.2    Lee, Y.T.3
  • 8
    • 0031559338 scopus 로고    scopus 로고
    • "Vertical cavity lasers with tapered oxide apertures for low scattering loss"
    • E. R. Hegblom, B. J. Thibeault, R. L. Naone, and L. A. Coldren, "Vertical cavity lasers with tapered oxide apertures for low scattering loss," Electron. Lett., vol. 33, pp. 869-871, 1997.
    • (1997) Electron. Lett. , vol.33 , pp. 869-871
    • Hegblom, E.R.1    Thibeault, B.J.2    Naone, R.L.3    Coldren, L.A.4
  • 10
    • 0038789477 scopus 로고
    • "Improved epitaxial layer design for real-time monitoring of dry etching in III-V compound semiconductor heterostructures with depth accuracy of 8 nm"
    • G. A. Vawter, J. F. Klem, and R. E. Leibenguth, "Improved epitaxial layer design for real-time monitoring of dry etching in III-V compound semiconductor heterostructures with depth accuracy of 8 nm," J. Vac. Sci. Technol. A, vol. 12, pp. 1973-1977, 1994.
    • (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 1973-1977
    • Vawter, G.A.1    Klem, J.F.2    Leibenguth, R.E.3
  • 11
    • 0033221863 scopus 로고    scopus 로고
    • "Tapered air apertures for thermally robust VCL structures"
    • Nov
    • R. L. Naone and L. A. Coldren, "Tapered air apertures for thermally robust VCL structures," IEEE Photon. Technol. Lett., vol. 11, no. 11, pp. 1339-1341, Nov. 1999.
    • (1999) IEEE Photon. Technol. Lett. , vol.11 , Issue.11 , pp. 1339-1341
    • Naone, R.L.1    Coldren, L.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.