Diagnostics of pulsed vacuum arc discharges by optical emission spectroscopy and electrostatic double-probe measurements

Vacuum

Volumn 81, Issue 4, 2006, Pages 411-416

  Garcia L A ^a   Restrepo, E ^a   Jimenez H ^a   Castillo, H A ^a   Ospina, R ^a   Benavides, V ^a   Devia, A ^a  

^a UNIVERSIDAD NACIONAL DE COLOMBIA   (Colombia)

Author keywords

Electrostatic probe; OES; Pulsed arc

Indexed keywords

ELECTROSTATICS; HYDROGEN BONDS; LIGHT EMISSION; PLASMAS; PROBES; SPECTROSCOPIC ANALYSIS;

ELECTROSTATIC PROBE; OES; PLASMA CHARACTERISTICS; PULSED VACUUM ARC;

VACUUM APPLICATIONS;

EID: 33750067041     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.06.005     Document Type: Article

References (33)

1. Venugpalan M. Reaction under plasma conditions vol. I (1971), Willey-Interscience, New York
2. Randhawa H. Thin Solid Films 167 (1988) 175
3. Kelly H., Lepone A., and Marquez A. J Appl Phys 89 (2003) 1567
4. Andujar J.L., Pascual E., Viera G., and Bertran E. Thin Solid Films 317 (1998) 120
5. Schermer S., Bings N.H.., Bilgic A.M., Stonies R., Voges E., and Broekaert C. Spectrochem Acta B 58 (2003) 1585
6. Ready J.F. Effects of high-power laser adiation (1971), Academic Press, New York
7. Peter S., Richter F., Tabersky R., and Konig U. Thin Solid Films 377-378 (2000) 430
8. Mermet JM. Inductively coupled plasma: emission spectrometry. In: Spectroscopic diagnostics: basic concepts. Part II, Chapted X. New York: Wiley-Interscience; 1987.
9. Fernandez J.I., Ballesteros J., Colomer V., and Hernández M.A. J Appl Phys 77 (1995) 2937
10. Vanderbecq A., Wautelet M., Dauchot J.P., Hecqa M., Pointu A.M., and Ricard A. J Appl Phys 84 (1998) 100
11. Nairm C.M., Annaratone B.M., and Allen J.E. Plasma Sources Sci Technol 4 (1995) 416
12. Kutzner J., Batura R., and Stachowiak Z. IEEE Trans Plasma Sci 27 (1999) 888
13. Restrepo E., Garcia L.A., Castro J.J., and Devia A. Appl Surf Sci 15 (2005) 1276
14. Bruzzone H., Kelly H., Marquez A., Lamas D., Ansaldi A., and Oviedo C. Plasma Sources Sci Technol 5 (1996) 582
15. Restrepo E., and Devia A. J Vac Sci Technol 22 (2004) 373
16. Faure G., André P., and Lefort A. J Phys D 32 (1999) 2376
17. Bababeygy S., Boxman R.L., and Goldsmith S. IEEE Trans Plasma Sci 15 (1987) 599
18. Sola A., Calzada M.D., and Gomero A. J Phys D 28 (1995) 1099
19. Atomic Spectra Databases, Version 2.0, National Institute of Standards Technology (NIST), USA, 1999, 〈http://www.nist.gov〉.
20. Kurucz RL. Atomic spectral line database from CD-ROM 23. Harvard-Smithsonian Center for Astrophysics, 1995, 〈http://cfa-www.harvard.edu〉.
21. Environmental chemistry and Hazardous materials information and resources, 〈http://environmentalchemistry.com/yogi/periodic〉.
22. Fisher V., Bernshton V., Goltel H., and Maron Y. Phys Rev A 53 (1996) 2425
23. Griem H. Plasma Spectroscopy (1964), MacGraw-Hill, New York
24. Zeng X., Mao S., Liu C., Mao X., Greif R., and Russo R. Spectrochem Acta B 58 (2003) 867
25. Liu H., Mao X., Yoo J., and Russo R. Spectrochem Acta B 54 (1999) 1607
26. Kano K., Suzuki M., and Akatsuka H. Plasma Sources Sci Technol 9 (2000) 314
27. Colon C., Hatem G., Verdugo E., Ruiz P., and Campos J. J Appl Phys 73 (1993) 4752
28. Griem H. Spectral line broadening by plasmas (1974), Academic Press, New York
29. Wolf P. J Appl Phys 72 (1992) 1280
30. Garcia L., Pulzara A., Devia A., and Restrepo E. J Vac Sci Technol A 23 (2005) 551
31. Grondona D., Kelly H., Marquez A., and Minotti F. J Phys D 31 (1998) 1
32. Roychowdhury P., Paithankar A., Iyyengar S., and Rohatagi V. Plasma Phys Controlled Fusion 29 (1987) 651
33. Chen F. Plasma diagnostic techniques. In: Huddle-Stone R.H., Leonard L., (Eds) (1995), Academic Press, New York