Optical emission spectroscopy of a PCVD process used for the deposition of TiN on cemented carbides

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 430-435

  Peter, S ^a   Richter, F ^a   Tabersky, R ^b   Konig U ^b  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b 45021   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBIDES; EMISSION SPECTROSCOPY; IONIZATION OF SOLIDS; LIGHT EMISSION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TITANIUM NITRIDE;

PLASMA EXCITATION;

CONDUCTIVE FILMS;

EID: 0034517241     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01270-0     Document Type: Article

References (21)

1. König U., Tabersky R., van den Berg H. Surface Coatings Technol. 50:1991;57.
2. R. Tabersky, H. van den Berg, U. König, Thin Solid films.
3. S. Peter, F. Richter, in J.V. Heberlein, D.W. Ernie, J.T. Roberts (Eds), Proceedings of the 12th International Symposium on Plasma Chemistry (ISPC-12), Minneapolis, MN, USA, 1995:2137.
4. Ishii Y., et al. Surface Coatings Technol. 49:1991;279.
5. Rie K.-T., Gebauer A., Wöhle J. Plasma Chem. Plasma Proc. 13:(1):1993;93.
6. Hochreiter R., Laimer J., Störi H., Heim D. Surface Coatings Technol. 74-75:1995;443.
7. Hiramatsu K., Ohnishi H., Takahama T., Yamanishi K. J. Vac. Sci. Technol. A. 14:(3):1996;1037.
8. Rie K.-T., Gebauer A., Wöhle J. Surface Coatings Technol. 86-87:1996;498.
9. Boumerzoug M., Boudreau M., Mascher P. Plasma Chem. Plasma Proc. 17:(2):1997;181.
10. Ohshita Y., Watanabe K. J. Electrochem. Soc. 145:(7):1998;2558.
11. Mogensen K.S., Eskildsen S.S., Mathiasen C., Bottiger J. Surface Coatings Technol. 102:1998;41.
12. Striganov A.R., Sventitskii N.S. Tables of Spectral Lines of Neutral and Ionized Atoms. 1968;IFI/Plenum, New York, Washington.
13. N. Saidel, W.K. Prokofiew, S.M. Raiski, Spektraltabellen, Verlag Technik, Berlin, 1955.
14. Pearse R.W.B., Gaydon A.G. The Identification of Molecular Spectra. Fourth Edition :1976;Chapman & Hall, London.
15. Herzberg G. Spectra of Diatomic Molecules. 1950;Princeton.
16. H.M. Crosswhite (Ed.), The Hydrogen Molecule Wavelength Tables of Gerhard Heinrich Dieke, Wiley-Interscience, New York, London, Sydney, Toronto, 1972.
17. A. Lofthus, P.H. Krupenie, J. Phys. Chem. Ref. Data 6, 1 (1977) 113.
18. Mogensen K.S., Mathiasen C., Eskildsen S.S., Störi H., Bottiger J. Surface Coatings Technol. 102:1998;35.
19. Beer T.A., Laimer J., Störi H. Surface Coatings Technol. 120-121:1999;331.
20. T.A. Beer, C. Kugler, J. Laimer, H. Störi, Proceedings of the 14th International Symposium on Plasma Chemistry, August 2-6, 1999, Prague, Czech Republic, Volume III, 1541.
21. J.I.F. Palop et al., in: Lukac, Kosinar, Skalny (Eds), ESCAMPIC 96, Europhysics Conference Abstracts, Vol. 20E, Part A, 157.