Diagnostics of inductively amplified magnetron discharges by optical emission, absorption spectroscopy, and Langmuir probe measurements

Journal of Applied Physics

Volumn 84, Issue 1, 1998, Pages 100-106

  Vanderbecq, A C ^a   Wautelet, M ^a   Dauchot, J P ^a   Hecq, M ^a   Pointu, A M ^b   Ricard, A ^c  

^a UNIVERSITY OF MONS   (Belgium)

^b UNIVERSITÉ PARIS SUD   (France)

^c UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ARGON; CARRIER CONCENTRATION; EMISSION SPECTROSCOPY; IONIZATION OF SOLIDS; IONS; LIGHT ABSORPTION; LIGHT EMISSION; MAGNETRONS; MATHEMATICAL MODELS; PLASMAS; TEMPERATURE;

LANGMUIR PROBE MEASUREMENT; MAGNETRON DISCHARGE; QUARTZ MICROBALANCE;

ELECTRIC DISCHARGES;

EID: 0032112522     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368006     Document Type: Article

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