Optical emission spectroscopy of rf glow discharges of methane-silane mixtures

Thin Solid Films

Volumn 317, Issue 1-2, 1998, Pages 120-123

  Andujar J L ^a   Pascual, E ^a   Viera, G ^a   Bertran, E ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

OES; Rf glow discharges; Thin films

Indexed keywords

CHEMICAL VAPOR DEPOSITION; EMISSION SPECTROSCOPY; METHANE; MIXTURES; SILANES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

OPTICAL EMISSION SPECTROSCOPY; RF GLOW DISCHARGE;

FILM GROWTH;

EID: 0032048313     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00606-8     Document Type: Article

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