Coupled luminescence centres in erbium-doped silicon rich silicon oxide thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6343 II, Issue , 2006, Pages

  Blakie, D E ^a   Zalloum, O H Y ^a   Wojcik, J ^a   Irving, E J ^a   Knights, A P ^a   Mascher, P ^a  

^a MCMASTER UNIVERSITY   (Canada)

Author keywords

Erbium; Interconnect; Luminescence; Nano cluster; Silicon rich oxide

Indexed keywords

INTERCONNECTS; NANO-CLUSTERS; SILICON RICH OXIDE;

ELECTROLUMINESCENCE; ERBIUM; FILM GROWTH; MICROPROCESSOR CHIPS; MONOLITHIC INTEGRATED CIRCUITS; PHOTOLUMINESCENCE; SILICON COMPOUNDS;

THIN FILMS;

EID: 33750019428     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.708049     Document Type: Conference Paper

References (38)

1. L. Canham, "Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers," Appl. Phys. Lett., 57, 1046, 1990.
2. L. Pavesi, L. Dal Negro, C. Mazzoleni, G. Franzo, F. Priolo, "Optical gain in silicon nanocrystals," Nature, 408, 440-444, 2000.
3. A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolescu, M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide semiconductor capacitor," Nature, 427, 615-618, 2004.
4. J. Doylend, et. al., (to be published).
5. P. Foster, J. Doylend, P. Mascher, A. Knights, "Optical attenuation in defect-engineered silicon rib waveguides," J. Appl. Phys. 99, 073101-(1-7), (2006).
6. M. Oehme, J. Werner, M. Jutzi, G. Wohl, E. Kasper, M. Berroth, "High-speed germanium photodiodes monolithically integrated on silicon with MBE," Thin Solid Films, 508, 393-395, 2006.
7. A. Knights, J. Bradley, S. Gou, P. Jessop, "Silicon-on-insulator waveguide photodetector with self-ion-implantation-engineered-enhanced infrared response," J. Vac. Sci. Tech. A, 24, 783-786, 2006.
8. H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, M. Paniccia, "A continuous-wave Raman silicon laser," Nature, 433, 725-728, 2005.
9. O. Boyraz, B. Jalali, "Demonstration of a silicon Raman laser," Opt. Express, 12, 5269-5273, 2004.
10. A. Fang, H. Park, R. Jones, O. Cohen, M. Paniccia, J. Bowers, "A continuous-wave hybrid AlGaInAs-silicon evanescent laser," IEEE Photonics Technology Letters, 18, 1143-1145, 2006.
11. H. Park, A. Fang, S. Kodama, J. Bowers, "Hybrid silicon evanescent laser fabricated with a silicon waveguide and III-V offset quantum wells," Opt. Express, 13, 9460-9464, 2005.
12. S. Coffa, "Light from silicon," IEEE Spectrum, October 2005, 44-49, 2005.
13. M. Castagna, S. Coffa, M. Monaco, A. Muscara, L. Caristia, S. Lorenti, A. Messina, "High efficiency light emitting devices in silicon," Mat. Sci. Eng. B, 105, 83-90, 2003.
14. L. Pavesi, "Routes toward silicon-based lasers," Materials Today, January 2005, 18-25, 2005.
15. T. Trupke, J. Zhao, A. Wang, R. Corkish, M.A. Green, "Very efficient light emission from bulk crystalline silicon," App. Phys. Lett., 82, 2996-2998, 2003.
16. J. Zhao, M.A. Green, A. Wang, "High-efficiency optical emission, detection, and coupling using silicon diodes," J. Appl. Phys., 92, 2977-2979, 2002.
17. W.L. Ng, M.A. Lourenco, R.M. Gwilliam, S. Ledian, G. Shao, K.P. Homewood, " An efficient room-temperature silicon-based light-emitting diode," Nature, 410, 192-194, 2001.
18. T. Stoica, L. Vescan, M. Goryll, "Electroluminescence of strained SiGe/Si selectively grown above the critical thickness for plastic relaxation" J. Appl. Phys., 83, 3367-3373, 1998.
19. y alloy layers on Si (100)," Appl. Phys. Lett., 67, 3915-3917, 1995.
20. x films," J. Appl. Phys., 95, 3723-3732, 2004.
21. T.G. Brown, D.G. Hall, "Optical emission at 1.32 μm from sulfur-doped cystalline silicon," Appl. Phys. Lett., 49, 245-247, 1986.
22. I.N. Yassievich, A.S. Moskalenko, "Excitation mechanism of erbium photoluminescence in bulk silicon and silicon nanostructures," Materials Science and Engineering B, 105, 192-196, 2003.
23. D.J. Lockwood, L. Pavesi, "Silicon Fundamentals for Photonics Applications," Silicon Photonics, ed. by L. Pavesi, D.J. Lockwood, 94, 1-50, Springer-Verlag, Berlin, 2004.
24. R. Walters, G. Bourianoff, H. Atwater, "Field-effect electroluminescence in silicon nanocrystals," Nature Materials, 4, 143-146, 2005.
25. G. Franzo, S. Coffa, F. Priolo, C. Spinella, "Mechanism and performance of forward and reverse bias electroluminescence at 1.54 μm from Er-doped Si diodes," J. Appl. Phys., 81, 2784-2793, 1997.
26. D. Pacifici, G. Franzo, F. Priolo, F. lacona, L. Dal Negro, "Modeling and perspectives of the Si nanocrystals-Er interaction for optical amplification," Phys. Rev. B., 67, 245301-(1-13), 2003.
27. Z. Zhou, L. Brus, R. Friesner, "Electronic structure and luminescence of 1.1 - and 1.4-nm silicon nanocrystals: oxide shell versus hydrogen passivation," Nano Letters, 3, 163-167, 2003.
28. A. Puzder, A. Williamson, J. Grossman, G. Galli, "Computational studies of the optical emission of silicon nanocrystals," J. Am. Chem. Soc., 125, 2786-2791, 2003.
29. 2: beyond the quantum confinement effect," Phys. Rev. B, 71, 03540-(1-15), 2005.
30. M. Wolkin, J. Jorne, P. Fauchet, G. Allan, C. Delerue, "Electronic states and luminescence in porous silicon quantum dots: the role of oxygen," Phys. Rev. Lett., 82, 197-200, 1999.
31. K. Imakita, M. Fujii, S. Hayashi, "Spectrally resolved energy transfer from excitons in Si nanocrystals to Er ions," Phys. Rev. B, 71, 193301-(1-4), 2005.
32. 2 multilayered structures," J. Appl. Phys., 96, 2254-2260, 2004.
33. M. Boudreau, M. Boumerzoug, P. Mascher, P.E. Jessop, "Electron cyclotron resonance chemical vapour deposition of silicon oxynitrides using tris(dimethylamino)silane," Appl. Phys. Lett., 63, 3014-3016, 1993.
34. O. Zalloum, M. Flynn, T. Roschuk, J. Wojcik, E. Irving, P. Mascher, "Laser photoluminescence spectrometer based on charge-coupled device detection for silicon-based photonics," Rev. Sci. Inst., 77, 023907-(1-8), 2006.
35. x," Phys. Rev. B, 69, 245202-(1-8), 2004.
36. 2," Appl. Phys. Lett., 87, 213110-(1-3), 2005.
37. C. Lin, G. Lin, "Defect-enhanced visible electroluminescence of multi-energy silicon-implanted silicon dioxide film," IEEE Journal of Quantum Electronics, 41, 441-447, 2005.
38. A. Irrera, F. Iacona, I. Crupi, C. Presti, G. Franzo, C. Bongiorno, D. Sanfilippo, G. Di Stefano, A. Piana, P. Fallica, A. Canino, F. Priolo, "Electroluminescence and transport properties in amorphous silicon nanostructures," Nanotechnology, 17, 1428-1436, 2006.