Pressure-driven devices with lithographically fabricated composite epoxy-elastomer membranes

Applied Physics Letters

Volumn 89, Issue 15, 2006, Pages

  Campbell, Kyle ^a   Levy, Uriel ^b   Fainman, Yeshaiahu ^b   Groisman, Alex ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MEMBRANES; ELASTOMER MEMBRANES; POLYDIMETHYLSILOXANE MEMBRANE;

ACTUATORS; ADAPTIVE OPTICS; DEFORMATION; EPOXY RESINS; LITHOGRAPHY; PRESSURE EFFECTS;

ELASTOMERS;

EID: 33750005097     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2361169     Document Type: Article

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