Method to assess the grain crystallographic orientation with a submicronic spatial resolution using Kelvin probe force microscope

Applied Physics Letters

Volumn 89, Issue 15, 2006, Pages

  Gaillard, Nicolas ^a   Gros Jean, Mickael ^a   Mariolle, Denis ^b   Bertin, Fraņois ^b   Bsiesy, Ahmad ^c,d  

^a STMICROELECTRONICS   (France)

^b CEA LETI   (France)

^c UNIV GRENOBLE ALPES   (France)

^d UMR 8191   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DIFFRACTION; OPTICAL RESOLVING POWER; POLYCRYSTALLINE MATERIALS; THIN FILMS;

GRAIN CRYSTALLOGRAPHIC ORIENTATION; KELVIN PROBE FORCE MICROSCOPE (KFM); SPATIAL RESOLUTION;

CRYSTALLOGRAPHY;

EID: 33749987764     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2359297     Document Type: Article

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