Normal-incidence generalized ellipsometry using the two-modulator generalized ellipsometry microscope

Applied Optics

Volumn 45, Issue 22, 2006, Pages 5479-5488

  Jellison Jr , Gerald E ^a,b   Hunn, John D ^a,c   Rouleau, Christopher M ^a,b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b Condensed Matter Sciences Division ^*  (United States)

^c Metals and Ceramies Division

Author keywords

[No Author keywords available]

Indexed keywords

ATTENUATION; ELECTROMAGNETIC WAVE POLARIZATION; OPTICAL MATERIALS; OPTICAL MICROSCOPY; OPTICAL RESOLVING POWER;

DIATTENUATION; INCIDENCE REFLECTION; MUELLER MATRIX;

ELLIPSOMETRY;

EID: 33749829593     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.005479     Document Type: Article

References (23)

1. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1977).
2. 2," J. Opt. Soc. Am. A13, 875-883 (1996).
3. M. Schubert, "Generalized ellipsometry and complex optical systems," Thin Solid Films 313-314, 323-332 (1998).
4. P. S. Hauge, "Mueller matrix ellipsometry with imperfect compensators," J. Opt. Soc. Am. 68, 1519-1528 (1978).
5. D. H. Goldstein, "Mueller matrix dual-rotating retarder polarimeter," Appl. Opt. 31, 6676-6683 (1992).
6. D. H. Goldstein and R. A. Chipman, "Error analysis of a Mueller matrix polarimeter," J. Opt. Soc. Am. A 7, 693-700 (1990).
7. C. Chen, I. An, G. M. Ferreira, N. J. Podraza, J. A. Zapien, and R. W. Collins, "Multichannel Mueller matrix ellipsometer based on the dual rotating compensator principle," Thin Solid Films 455-56 14-23 (2004).
8. G. E. Jellison, Jr. and F. A. Modine, "Two-modulator generalized ellipsometry: experiment and calibration," Appl. Opt. 36, 8184-8189 (1997).
9. G. E. Jellison, Jr. and F. A. Modine, "Two-modulator generalized ellipsometry: theory," Appl. Opt. 36, 8190-8198 (1997).
10. 2)," Opt. Lett 22, 1808-1810 (1997).
11. G. E. Jellison, Jr. and L. A. Boatner, "Optical functions of uniaxial ZnO determined by generalized ellipsometry," Phys. Rev. B 58, 3586-3589 (1998).
12. G. E. Jellison, Jr., F. A. Modine, and L. A. Boatner, "Measurements of the optical functions of uniaxial crystals using two-modulator generalized ellipsometry (2-MGE)," in Optical Diagnostic Methods for Inorganic Transmissive Materials, R. V. Datla and L. M. Hanssen, eds., Proc. SPIE 3425, 232-238 (1998).
13. 3 measured by generalized transmission ellipsometry," Appl. Phys. Lett. 81, 1222-1224 (2002).
14. G. E. Jellison, Jr., C. O. Griffiths, D. E. Holcomb, and C. M. Rouleau, "Transmission two-modulator generalized ellipsometry measurements," Appl. Opt. 41, 6555-6566 (2002).
15. G. E. Jellison, Jr., C. O. Griffiths, D. E. Holcomb, and C. M. Rouleau, "Characterization of linear diattenuator and retarders using a two-modulator generalized ellipsometer," in Polarization Measurement, Analysis, and Applications V, D. H. Goldstein and D. B. Chenault, eds., Proc. SPIE 4819, 9-19 (2002).
16. D. W. Stevens, "A perpendicular-incidence microellipsometer," Surf. Sci 96, 174-201 (1980).
17. E. D. Palik, ed., Handbook of Optical Constants of Solids (Academic, 1985).
18. V. V. Filippov, A. Yu. Tronin, and A. F. Konstantinova, "Ellipsometry of anisotropic media," Crystallogr. Rep. 39, 313-335 (1994).
19. R. A. Chipman, "Polarimetry," in Handbook of Optics, Vol. II, 2nd ed. (McGraw-Hill, 1995), Chap. 22.
20. D. G. M. Anderson and R. Barakat, "Necessary and sufficient conditions for a Mueller matrix to be derivable from a Jones matrix," J. Opt. Soc. Am. A 11, 2305-2319 (1994).
21. T. C. Oakberg, "Modulated interference effects: use of photoelastic modulators with lasers," Opt. Eng. 34, 1545-1550 (1995).
22. G. E. Jellison, Jr., "Windows in ellipsometry measurements," Appl. Opt. 38, 4784-4789 (1999).
23. J. M. Bennett, "Polarization," in Handbook of Optics, Vol. I, 2nd ed. (McGraw-Hill, 1995), Chap. 5.