Thermal and dielectric stability of parylene X

Materials Research Society Symposium Proceedings

Volumn 914, Issue , 2006, Pages 101-106

  Senkevich, Jay J ^a   Carrow, Brad ^a   Wang, Pei I ^b  

^a BREWER SCIENCE INC   (United States)

^b RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC DEVICES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LEAKAGE CURRENTS; METALLIZING; PERMITTIVITY; THERMODYNAMIC STABILITY;

BACK-END-OF-THE-LINE (BEOL) STRUCTURES; DIELECTRIC STABILITY; DIELECTRIC STACK; PARYLENE X;

OLEFINS;

EID: 33749600114     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-0914-f03-06     Document Type: Conference Paper

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