Correlation Between Bond Cleavage in Parylene N and the Degradation of Its Dielectric Properties

Electrochemical and Solid-State Letters

Volumn 7, Issue 4, 2004, Pages

  Senkevich, Jay J ^a   Mallikarjunan, A ^a   Wiegand, C J ^a   Lu, T M ^a   Bani Salameh, H N ^b   Lichti, R L ^b  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b TEXAS TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CAPACITANCE; CHEMICAL BONDS; CORRELATION METHODS; DEGRADATION; DIELECTRIC PROPERTIES; ELECTRON RESONANCE; LEAKAGE CURRENTS; PARAMAGNETIC RESONANCE; PYROLYSIS; THERMAL EFFECTS; THERMOGRAVIMETRIC ANALYSIS;

CHARGE TRAPS; MATERIAL DEGRADATION;

ELECTROCHEMISTRY;

EID: 1842529994     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1646834     Document Type: Article

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