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Volumn 863, Issue , 2005, Pages 189-194
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Poly(ethynyl-p-xylylene), An advanced molecular caulk CVD polymer
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CHEMICAL VAPOR DEPOSITION;
CROSSLINKING;
DIELECTRIC MATERIALS;
FRACTURE TOUGHNESS;
PERMITTIVITY;
OPTICAL CONSTANTS;
OPTICAL LOSSES;
ULTRA-LOW K (ULK) DIELECTRICS;
ORGANIC POLYMERS;
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EID: 28844459479
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-863-b2.10 Document Type: Conference Paper |
Times cited : (9)
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References (13)
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