Effect of electric charge accumulation on the modification of surface properties by means of low energy ion implantation

Journal of Physics D: Applied Physics

Volumn 39, Issue 20, 2006, Pages 4429-4435

  Yedji, M ^a   Ross, G G ^a  

^a INRS EMT   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CHARGE; ION IMPLANTATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SURFACE PROPERTIES; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

CHARGE NEUTRALIZATION; ELASTIC RECOIL DETECTION; ELECTRIC CHARGE ACCUMULATION; LOW ENERGY ION IMPLANTATION;

ELECTRIC INSULATORS;

EID: 33749426385     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/39/20/020     Document Type: Article

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