Effect of electric charge accumulation on low energy ion implantation in insulators

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 230, Issue 1-4, 2005, Pages 386-390

  Yedji, M ^a   Ross, G G ^a  

^a INRS EMT   (Canada)

Author keywords

Electric charge accumulation; ERD depth profiles; Hydrogen; Insulators; Ion implantation; Low energy; Polymers

Indexed keywords

ELECTRIC CHARGE; ELECTRIC INSULATORS; ELECTRON EMISSION; HYDROGEN; OPTICAL COLLIMATORS; POLYETHYLENES; SILICON;

ELASTIC RECOIL DETECTION (ERD); ELECTRIC CHARGE ACCULULATION; ERD DEPTH PROFILES; LOW ENERGY;

ION IMPLANTATION;

EID: 14744287553     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.12.071     Document Type: Conference Paper

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