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Volumn 92, Issue 10, 2002, Pages 5872-5877
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Effect of aging on wettability of silicon surfaces modified by Ar implantation
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Author keywords
[No Author keywords available]
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Indexed keywords
AMBIENT AIR;
ANGLE-RESOLVED X-RAY PHOTOELECTRON SPECTROSCOPY;
APPARENT CONTACT ANGLE;
AR IMPLANTATION;
ARGON ATMOSPHERES;
CARBON CONCENTRATIONS;
CARBONACEOUS LAYERS;
CARBONACEOUS SURFACE;
CONTACT ANGLE HYSTERESIS;
EXPERIMENTAL MEASUREMENTS;
FLUENCES;
HYDROPHILIC SURFACES;
HYDROPHOBIC SURFACES;
NATIVE OXIDE LAYER;
OXYGEN PARTIAL PRESSURE;
SILICON OXIDE SURFACES;
SILICON SURFACES;
CONTACT ANGLE;
HYDROPHOBICITY;
ION IMPLANTATION;
PHOTOELECTRONS;
SILICON OXIDES;
SURFACE CHEMISTRY;
X RAY PHOTOELECTRON SPECTROSCOPY;
ARGON;
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EID: 0037112957
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1516866 Document Type: Article |
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Times cited : (14)
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References (11)
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