Photovoltaic effect on the conductive atomic force microscopic characterization of thin dielectric films

Applied Physics Letters

Volumn 89, Issue 13, 2006, Pages

  Chang, M N ^a   Chen, C Y ^a   Yang, M J ^b   Chien, C H ^c  

^a National Nana Device Laboratories   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

^c NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC FIELD EFFECTS; LASER BEAMS; LEAKAGE CURRENTS; PHOTOVOLTAIC EFFECTS; THIN FILMS;

CONDUCTIVE ATOMIC FORCE MICROSCOPY (C-AFM); FRONT-WING CONDUCTIVE PROBES; ONSET VOLTAGE;

DIELECTRIC FILMS;

EID: 33749240724     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2357873     Document Type: Article

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