Fabrication of ultrasonic transducers using epitaxial Pb(Zr,Ti)O 3 thin films on epitaxial γ-Al2O3/Si substrates for smart sensors

Sensors and Materials

Volumn 18, Issue 3, 2006, Pages 161-169

  Akai, Daisuke ^a   Oba, Yasuhiro ^a   Okada, Nagaya ^b   Ito, Mikinori ^a   Sawada, Kazuaki ^a,c   Takao, Hidekuni ^a,c   Ishida, Makoto ^a,b,c  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b HONDA ELECTRONICS CO LTD   (Japan)

^c JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Al2O3; Pb(Zr,Ti)O3; Piezoelectric; Ultrasonic transducer on Si

Indexed keywords

EID: 33749040879     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (13)

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