The joint astrophysical plasmadynamic experiment (J-PEX) high-resolution EUV spectrometer: Diffraction grating efficiency

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6266 I, Issue , 2006, Pages

  Kowalski, M P ^a   Berendse, F B ^a   Barbee Jr , T W ^b   Hunter, W R ^c   Heidemann, K F ^d   Lenke, R ^d   Seifert, A ^d   Cruddace, R G ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^c SFA INC   (United States)

^d CARL ZEISS SMT AG   (Germany)

Author keywords

Diffraction gratings; Extreme Ultraviolet; Multilayer coatings; Spectrometers; Surface measurements

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTION GRATINGS; HOLOGRAPHY; MULTILAYERS; SURFACE MEASUREMENT;

EXTREME ULTRAVIOLET; ION-ETCHED POLYMERS; MULTILAYER COATINGS;

ULTRAVIOLET SPECTROMETERS;

EID: 33749019107     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.670351     Document Type: Conference Paper

References (26)

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