Efficiency calibration of the four multilayer-coated holographic ion-etched flight gratings for a sounding rocket high-resolution spectrometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4498, Issue , 2001, Pages 303-314

  Kowalski, M P ^a   Gursky, H ^a   Rife, J C ^a   Yentis, D J ^a   Cruddace, R G ^a   Barbee, T W ^b   Goldstein, W H ^b   Kordas, J F ^b   Heidemann, K F ^c   Fritz, G G ^d   Hunter, W R ^e   Barstow, M A ^f   Fraser, G W ^f   Bannister, N P ^f   Lapington, J S ^g   Tandy, J A ^g   Sanderson, B ^g  

^a NAVAL RESEARCH LABORATORY   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^c CARL ZEISS SMT AG   (Germany)

^d PRAXIS INC   (United States)

^e SFA INC   (United States)

^f UNIVERSITY OF LEICESTER   (United Kingdom)

^g Holmbury St Mary   (United Kingdom)

Author keywords

Diffraction gratings; Extreme ultraviolet; Multilayer coatings; Spectrometers; Surface measurements

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; DIFFRACTION GRATINGS; HOLOGRAPHY; OPTICAL COATINGS; OPTICAL MULTILAYERS; SOUNDING ROCKETS; SURFACE MEASUREMENT; SURFACE ROUGHNESS; SYNCHROTRON RADIATION;

EXTREME ULTRAVIOLET; HOLOGRAPHIC ION ETCHING; MULTILAYER COATINGS;

ULTRAVIOLET SPECTROMETERS;

EID: 0038391559     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.450065     Document Type: Article

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