The joint astrophysical plasmadynamic experiment extreme ultraviolet spectrometer: Resolving power

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6266 I, Issue , 2006, Pages

  Berendse, F B ^a,g   Cruddace, R G ^a   Kowalski, M P ^a   Yentis, D J ^a   Hunter, W R ^a   Fritz, G G ^b   Siegmund, O ^c   Heidemann, K ^d   Lenke, R ^e   Seifert, A ^e   Barbee Jr , T W ^f  

^a NAVAL RESEARCH LABORATORY   (United States)

^b SFA INC   (United States)

^c PRAXIS INC   (United States)

^d Sensor Sciences LLC   (United States)

^e CARL ZEISS SMT AG   (Germany)

^f LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^g NRC ^*  (United States)

Author keywords

Extreme ultraviolet; Gratings; Holographic ion etching; Resolution; Spectrometer

Indexed keywords

EXTREME ULTRAVIOLET; GRATINGS; HOLOGRAPHIC ION ETCHING;

COMPUTER SIMULATION; DIFFRACTION GRATINGS; GALAXIES; HOLOGRAPHY; OPTICAL RESOLVING POWER; ULTRAVIOLET SPECTROMETERS;

ASTROPHYSICS;

EID: 33749000592     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.670064     Document Type: Conference Paper

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