Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: Topography

Applied Optics

Volumn 45, Issue 2, 2006, Pages 305-321

  Kowalski, Michael P ^a   Hunter, William R ^b   Barbee Jr , Troy W ^c  

^a NAVAL RESEARCH LABORATORY   (United States)

^b SFA INC   (United States)

^c LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; HOLOGRAPHIC INTERFEROMETRY; MULTILAYERS; REACTIVE ION ETCHING; SURFACE ROUGHNESS; SURFACE TOPOGRAPHY; ULTRAVIOLET RADIATION;

MULTILAYER COATINGS; REPLICATION; SPHERICAL BLAZED GRATINGS;

DIFFRACTION GRATINGS;

EID: 31344465479     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.000305     Document Type: Article

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