Development of nanometer resolution focus detector in vacuum for extreme ultraviolet microscope

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 9 A, 2006, Pages 7163-7166

  Tanaka, Yuzuru ^a,b   Watanabe, Takeo ^a,b   Hamamoto, Kazuhiro ^a,b   Kinoshita, Hiroo ^a,b  

^a UNIVERSITY OF HYOGO   (Japan)

^b Kawaguchi Center Bldg ^*  (Japan)

Author keywords

EUVL; Focus detector; Optical fiber; Photodiode; Vacuum

Indexed keywords

MICROSCOPES; NANOSTRUCTURED MATERIALS; OPTICAL FIBERS; OPTICAL RESOLVING POWER; PHOTODIODES; SEMICONDUCTOR LASERS; ULTRAVIOLET DEVICES; VACUUM APPLICATIONS;

EUVL; FOCUS DETECTORS; NUMERICAL APERTURE (NA);

DETECTORS;

EID: 33748999989     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.7163     Document Type: Article

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