|
|
Volumn 44, Issue 7 B, 2005, Pages 5547-5551
|
|
Reducing off hydrocarbon contaminants for EUVL
|
|
Author keywords
Metal; Motor; Outgassing; Teflon; Wire
|
|
Indexed keywords
DEGASSING;
IMAGING TECHNIQUES;
IMPURITIES;
METALS;
MOTORS;
MULTILAYERS;
ORGANIC COMPOUNDS;
POLYTETRAFLUOROETHYLENES;
VACUUM;
WIRE;
DESORBED HYDROCARBONS;
EXTREME ULTRAVIOLET (EUV);
HYDROCARBONS;
|
|
EID: 31844440494
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.44.5547 Document Type: Article |
|
Times cited : (9)
|
|
References (8)
|
