Optimization of process parameters of titanium dioxide films by response surfaces methodology

Optics Communications

Volumn 266, Issue 2, 2006, Pages 574-581

  Tien, Chuen Lin ^a   Lin, Shane Wen ^a  

^a FENG CHIA UNIVERSITY   (Taiwan)

Author keywords

Ion beam assisted deposition; Optical properties; Response surface methodology; Thin films

Indexed keywords

DEPOSITION; EVAPORATION; ION BEAMS; MATHEMATICAL MODELS; OPTIMIZATION; SURFACE TREATMENT; THIN FILMS;

FACTORIAL PREDICTION MODEL; ION-BEAM ASSISTED DEPOSITION; OPTICAL CONSTANTS; RESPONSE SURFACE METHODOLOGY;

TITANIUM DIOXIDE;

EID: 33748980593     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2006.05.044     Document Type: Article

References (31)

1. Ritter E. J. Vac. Sci. Technol. 3 (1966) 25
2. Pulker H.K., Paesolk G., and Ritter E. Appl. Opt. 15 (1976) 2986
3. Küster H., and Ebert J. Thin Solid Films 70 (1980) 43
4. Chiao S.C., Bovard B.G., and Macleod H.A. Appl. Opt. 37 (1998) 5284
5. Lehmann H.W., and Frik K. Appl. Opt. 27 (1988) 4920
6. Rao K.N., Murthy M.A., and Mohan S. Thin Solid Films 176 (1989) 181
7. Rao K.N., and Mohan S. J. Vac. Sci. Technol. A8 (1990) 3260
8. Leprince-Wang Y., and Yu-Zhang K. Surf. Coat. Technol. 140 (2001) 155
9. Waibel F., Ritter E., and Linsbod R. Appl. Opt. 42 (2003) 4590
10. Sun L., and Hou P. Thin Solid Films 455-456 (2004) 525
11. Selhofer H., Ritter E., and Linsbod R. Appl. Opt. 41 (2002) 756
12. Rao K.N. Opt. Eng. 41 (2002) 2357
13. Varnier F. J. Vac. Sci. Technol. A 8 (1990) 2155
14. Gilo M., and Croitoru N. Thin Solid Films 283 (1996) 84
15. Tang Q., Kikuchi K., Ogura S., and Macleod H.A. J. Vac. Sci. Technol. A 17 (1999) 3379
16. Leprince-Wang Y., Souche D., Yu-Zhang K., Fisson S., Vuye G., and Rivory J. Thin Solid Films 359 (2000) 171
17. Bhattacharyya D., Sahoo N.K., Thakur S., and Das N.C. Thin Solid Films 360 (2000) 96
18. Lee C.C., Chen H.C., and Jaing C.C. Appl. Opt. 44 (2005) 2996
19. Mardare D., and Rusu G.I. Mater. Lett. 56 (2002) 210
20. Henderson P.S., Kely P.J., Arnell R.D., Bäcker H., and Baradley J.W. Surf. Coat. Technol. 174-175 (2003) 779
21. Martin N., Rousselot C., Rondot D., Palmino F., and Mercier R. Thin Solid Films 300 (1997) 113
22. Martin N., Baretti D., Rousselot C., and Rauch J.Y. Surf. Coat. Technol. 107 (1998) 172
23. Hsu J.C., and Lee C.C. Appl. Opt. 37 (1998) 1171
24. Wang W.H., and Chao S. Opt. Lett. 23 (1998) 1417
25. Bennett J.M., Pelletier E., Albrand G., Borgogno J.P., Lazarides B., Carniglia C.K., Schmell R.A., Allen T.H., Tuttle-Hart T., Guenther K.H., and Saxer A. Appl. Opt. 28 (1989) 3303
26. Aoki T., and Ogura S. OSA Tech. Digest Ser. 9 (1998) 207
27. Ritter E. Appl. Opt. 20 (1981) 21
28. Box G.E.P., and Wilson K.B. J. Roy. Statist. Soc. Ser. B 13 (1951) 1
29. Box G.E.P., and Draper N.R. Empirical Model-Building and Response Surfaces (1987), Wiley, New York
30. Montgomery D.C. Design and Analysis of Experiments. sixth ed. (2005), John Wiely & Sons, New York
31. Manifacier J.C., Gasiot J., and Fillard J.P. J. Phys. E 9 (1976) 1002