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Volumn 56, Issue 3, 2002, Pages 210-214
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The influence of heat treatment on the optical properties of titanium oxide thin films
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Author keywords
Optical properties; Semiconductors; Sputtering; Thin films; Titanium oxide
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Indexed keywords
AMORPHOUS MATERIALS;
ANNEALING;
POLYCRYSTALLINE MATERIALS;
REFRACTIVE INDEX;
SEMICONDUCTOR MATERIALS;
SPUTTER DEPOSITION;
TITANIUM OXIDES;
X RAY DIFFRACTION;
AMORPHOUS STRUCTURE;
THIN FILMS;
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EID: 0036793910
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0167-577X(02)00441-X Document Type: Article |
Times cited : (69)
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References (14)
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