Correlation between structural and electrical properties of ZnO thin films

Thin Solid Films

Volumn 476, Issue 1, 2005, Pages 201-205

  Asadov, A ^a   Gao, W ^a   Li, Z ^a   Lee, J ^a   Hodgson, M ^a  

^a UNIVERSITY OF AUCKLAND   (New Zealand)

Author keywords

Conductivity; Magnetron sputtering; Microstructure; Zinc oxide

Indexed keywords

DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRIC CURRENTS; FREQUENCIES; GLASS; MAGNETRON SPUTTERING; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

CRYSTALLITES; FILM THICKNESS; NONSTOICHIOMETRY; RADIO FREQUENCY (RF);

THIN FILMS;

EID: 13844266836     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.09.038     Document Type: Article

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