Laser molecular beam epitaxy growth and properties of SrTiO3 thin films for microelectronic applications

Thin Solid Films

Volumn 515, Issue 2 SPEC. ISS., 2006, Pages 559-562

  Hao, J H ^a   Gao, J ^a   Wong, H K ^b  

^a UNIVERSITY OF HONG KONG   (Hong Kong)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Heteroepitaxy; Microelectronics; Silicon; Strontium titanate; Tunability

Indexed keywords

EPITAXIAL GROWTH; LASER BEAMS; MICROELECTRONICS; MOLECULAR BEAM EPITAXY; SILICON; STRONTIUM COMPOUNDS;

HETEROEPITAXY; STRONTIUM TITANATE; TUNABILITY;

THIN FILMS;

EID: 33748749073     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.297     Document Type: Article

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