Laser MBE of ceramic thin films for future electronics

Applied Surface Science

Volumn 109-110, Issue , 1997, Pages 514-519

  Koinuma, H ^a   Kanda, N ^a   Nishino, J ^a   Ohtomo, A ^a   Kubota, H ^a   Kawasaki, M ^a   Yoshimoto, M ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; CERAMIC MATERIALS; DEPOSITION; FILM GROWTH; INTEGRATED CIRCUIT MANUFACTURE; LASER PULSES; PULSED LASER APPLICATIONS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SAPPHIRE; SEMICONDUCTING FILMS; SEMICONDUCTOR SUPERLATTICES; THIN FILMS;

CERAMIC THIN FILMS; LASER MOLECULAR BEAM EPITAXY; PULSED LASER DEPOSITION;

MOLECULAR BEAM EPITAXY;

EID: 0031076835     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00627-7     Document Type: Article

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