|
|
Volumn 74, Issue 1, 2002, Pages 104-108
|
|
High quality ITO film formation by the simultaneous use of cluster ion beam and laser irradiation
a
|
|
Author keywords
ITO film formation; KrF laser irradiation; O2 cluster ion beam
|
|
Indexed keywords
ANNEALING;
CARRIER CONCENTRATION;
CHEMICAL VAPOR DEPOSITION;
DOPING (ADDITIVES);
ELECTRIC CONDUCTIVITY;
GLASS;
INDIUM COMPOUNDS;
ION BEAMS;
LASER BEAM EFFECTS;
SUBSTRATES;
TIN;
TIN-DOPED INDIUM OXIDE (ITO) FILMS;
METALLIC FILMS;
|
|
EID: 0036466919
PISSN: 02540584
EISSN: None
Source Type: Journal
DOI: 10.1016/S0254-0584(01)00479-5 Document Type: Article |
|
Times cited : (24)
|
|
References (12)
|
