Nano-mechanics and micro-tribological behavior of N+-implanted silicon

Mocaxue Xuebao/Tribology

Volumn 26, Issue 4, 2006, Pages 289-294

  Zhang, De Kun ^a   Ge, Shi Rong ^a   Wang, Shi Bo ^a   Wang, Qing Liang ^a  

^a CHINA UNIVERSITY OF MINING AND TECHNOLOGY   (China)

Author keywords

Friction and wear behavior; Ion implantation; MEMS; Single crystal silicon

Indexed keywords

ELASTIC MODULI; FRICTION; HARDNESS; ION IMPLANTATION; MECHANICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; SINGLE CRYSTALS; WEAR RESISTANCE;

MICRO-ELECTROMECHANICAL SYSTEMS (MEMS); NITRIDE ION;

SILICON WAFERS;

EID: 33748683003     PISSN: 10040595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

1. Liu Y, Wen S Z. Study on performances of micro-friction and its control in MEMS[J]. Chinese Journal of Mechanical Engineering, 38(3): 1-5.
2. Sun R, Xu T, Xue Q J. Research progress in surface modification and micro-tribological behaviour of single-crystal silicon[J]. Tribology, 2004, 24(4): 382-385.
3. Liao J X, Liu W M, Xu T, et al. Tribological properties of DLC nanolayer on Si prepared by plasma-based ion implantation[J]. Tribology, 2004, 24(2): 115-118.
4. Muhlstein C L, Howe R T, Ritchie R O. Fatigue of polycrystalline silicon for microelectromechanical system applications: crack growth and stability under resonant loading conditions[J]. Mechanics of Materials, 2004, 36: 13-33.
5. Gatzen H H, Beck M. Investigations on the friction force anisotropy of the silicon lattice[J]. Wear, 2003, 254: 1122-1126.
6. Dearnaley G. Nuclear techniques and equipment for non-semi-conductor applications of ion implantation[J]. Inst Methods, 1980, 189: 117-121.
7. Benkherourou O, Sahnoune S, Djabi M, et al. Analysis of photoemission lines in silicon nitrided layer formed by low-energy nitrgen ion implantation in silicon[J]. Vacuum, 1999, 53: 427-433.
8. 4 and stressed layers under thermal and sputtering effect[J]. Surface and Coating Technology, 2001, 136: 244-248.
9. Gupta B K, Bhushan B. Nanoindentation studies of ion implanted silicon[J]. Surface and Coatings Technology, 1994, 68-69: 564-570.
10. Lekki J, Statchura Z, Preikschas N, et al. Friction and wear of argon-implanted silicon-crystals[J]. J Mater Res, 1994, 9: 91-95.
11. Kodali P, Hawley M, Walter K C, et al. Tribological properties of carbon- and nitrogen-implanted Si (100)[J]. Wear, 1997, 205: 144-152.