Tribological properties of DLC nanolayer on Si prepared by plasma-based ion implantation

Mocaxue Xuebao/Tribology

Volumn 24, Issue 2, 2004, Pages 115-118

  Liao, Jia Xuan ^a   Liu, Wei Min ^a   Xu, Tao ^a   Yan, Jie ^a   Xue, Qun Ji ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

Author keywords

Carbon nanofilm; Plasma based ion implantation; Single crystal Si; Tribological properties

Indexed keywords

CARBON; FILMS; ION IMPLANTATION; NANOSTRUCTURED MATERIALS; PROTECTIVE COATINGS; TRIBOLOGY; WEAR RESISTANCE;

DIAMOND LIKE CARBON NANOFILM; PLASMA BASED ION IMPLANTATION; SINGLE CRYSTAL SILICON;

SILICON WAFERS;

EID: 3042579583     PISSN: 10040595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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