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Volumn 38, Issue 3, 2002, Pages 1-5
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Study on performances of micro-friction and its control in MEMS
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Author keywords
Micro electro mechanical system; Micro friction; Performance and control
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Indexed keywords
FRICTION;
PERFORMANCE;
SURFACE TOPOGRAPHY;
FRICTION FORCE MICROSCOPY;
MICRO FRICTION;
MICROFRICTION CONTROL;
STICK SLIP;
MICROELECTROMECHANICAL DEVICES;
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EID: 0036520794
PISSN: 05776686
EISSN: None
Source Type: Journal
DOI: 10.3901/jme.2002.03.001 Document Type: Article |
Times cited : (16)
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References (11)
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