Sorption and desorption behaviors of hexadecane vapors in plasma deposited fluorocarbon films using a quartz crystal microbalance

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 5, 2006, Pages 1737-1745

  Vaswani, Sudeep ^a,c   Koskinen, Jere ^b   Hess, Dennis W ^a  

^a Georgia Institute of Technology   (United States)

^b PTS Munich   (Germany)

^c INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARRIER PROPERTIES; FLUOROCARBON FILMS; PENTAFLUOROETHANES; QUARTZ CRYSTALS;

DESORPTION; DIFFUSION; HYDROPHOBICITY; POLYMERIZATION; QUARTZ; SINGLE CRYSTALS; THICKNESS MEASUREMENT; THIN FILMS;

FLUOROCARBONS;

EID: 33748559542     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2217981     Document Type: Article

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