Segmented MEMS deformable-mirror technology for space applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6223, Issue , 2006, Pages

  Helmbrecht, Michael A ^a   Juneau, Thor ^b   Hart, Matthew ^c   Doble, Nathan ^a  

^a Iris AO Inc   (United States)

^b SiTime Corporation   (United States)

^c Owlstone Ltd   (United Kingdom)

Author keywords

Adaptive Optics; Deformable Mirror; MEMS; Spatial Light Modulator

Indexed keywords

ADAPTIVE OPTICS; FLIP CHIP DEVICES; FORMABILITY; LIGHT MODULATION; MICROACTUATORS; MICROELECTRODES; SILICON; SINGLE CRYSTALS; SPACE APPLICATIONS;

CLOSE-PACKED SEGMENTS; DEFORMABLE MIRROR TECHNOLOGY; OPEN LOOP CONTROLLERS; SINGLE CRYSTAL SILICON MIRROR;

MICROELECTROMECHANICAL DEVICES;

EID: 33748453317     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.666353     Document Type: Conference Paper

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