Electrostatic membrane deformable mirror wavefront control systems: Design and analysis

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5553, Issue , 2004, Pages 28-38

  Bush, Keith ^a   German, Dee ^a   Klemme, Beverly ^a   Marrs, Anthony ^a   Schoen, Michael ^a  

^a Intellite Inc   (United States)

Author keywords

Deformable mirror; Electrostatic; Membrane; MEMS; Wavefront control

Indexed keywords

DEFORMABLE MIRRORS; INFLUENCE FUNCTIONS (IF); LARGE MEMBRANE MIRRORS (LMM); WAVEFRONT CONTROL;

ABERRATIONS; CLOSED LOOP CONTROL SYSTEMS; ELECTRIC POTENTIAL; ELECTROSTATICS; FINITE ELEMENT METHOD; LEAST SQUARES APPROXIMATIONS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; WAVEFRONTS;

MIRRORS;

EID: 14944381928     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.560521     Document Type: Conference Paper

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