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Surface and Coatings Technology

Volumn 172, Issue 2-3, 2003, Pages 184-188

Plasma-enhanced deposition of hard silicon nitride-like coatings from hexamethyldisiloxane and ammonia

(2) Xiao, Z G a Mantei, T D a

a UNIVERSITY OF CINCINNATI (United States)

Author keywords

Elastic modulus; Electron cyclotron resonance; Hardness; Plasma enhanced deposition; Silicon nitrogen like coatings

Indexed keywords

AMMONIA; ELASTIC MODULI; ELECTRON CYCLOTRON RESONANCE; MICROWAVES; SILICON NITRIDE; STATISTICAL METHODS; STOICHIOMETRY; X RAY PHOTOELECTRON SPECTROSCOPY;

PLASMA-GROWN COATINGS;

COATINGS;

COATING; HARDNESS; PLASMA TREATMENT;

EID: 0038046287 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00341-4 Document Type: Article

Times cited : (20)

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