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Volumn 351, Issue 30-32, 2005, Pages 2462-2467

Structure evolution of fluorinated diamond-like carbon films prepared at varying source gas flow ratios

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; AROMATIC COMPOUNDS; CARBON; FLUORINE; GRAPHITE; INFRARED RADIATION; MAGNETRON SPUTTERING;

DIAMOND-LIKE CARBON FILMS; FLUORINE ATOMS; GAS FLOW; TRIFLUROMETHANE;

DIAMOND FILMS;

EID: 24144442839 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2005.06.042 Document Type: Article

Times cited : (19)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.