Alternative micro-hotplate design for low power sensor arrays

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1189-1191

  Triantafyllopoulou, R ^a   Chatzandroulis, S ^a   Tsamis, C ^a   Tserepi, A ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

Author keywords

Micro hotplates; Porous silicon; Thermal sensors

Indexed keywords

ENERGY UTILIZATION; OPTIMIZATION; POROUS SILICON; PRODUCT DESIGN; SENSORS; THERMODYNAMIC PROPERTIES;

LOW POWER SENSOR ARRAYS; MICRO HOTPLATES; PORTABLE SYSTEMS; THERMAL SENSORS;

MICROELECTRONICS;

EID: 33748278229     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.224     Document Type: Article

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