Numerical simulation of metal plasma-immersion ion implantation and deposition on a cone

Journal of Applied Physics

Volumn 96, Issue 11, 2004, Pages 6045-6052

  Cornet, Christophe ^a   Kwok, Dixon T K ^a   Bilek, M M M ^a   McKenzie, D R ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CONES; DEPOSITION; SURFACE TREATMENT;

CONE SURFACES; CYLINDRICAL COORDINATES; ION TRAJECTORIES; PLASMA-IMMERSION ION IMPLANTATION;

ION IMPLANTATION;

EID: 19144366346     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1808919     Document Type: Article

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