Implantation dynamics of plasma implantation into insulating strips

Journal of Physics D: Applied Physics

Volumn 37, Issue 1, 2004, Pages 50-54

  Tian, Xiubo ^a,b   Yang, Shiqin ^a   Huang, Yongxian ^a   Chu, Paul K ^b   Fu, Ricky K Y ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; INSULATING MATERIALS; ION IMPLANTATION; PLASMA SHEATHS; VELOCITY;

IMPLANTATION DYNAMICS; INSULATING STRIPS; PLASMA IMMERSION ION IMPLANTATION;

PLASMAS;

EID: 0345872342     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/1/009     Document Type: Article

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