High responsivity 4H-SiC Schottky UV photodiodes based on the pinch-off surface effect

Applied Physics Letters

Volumn 89, Issue 8, 2006, Pages

  Sciuto, Antonella ^a   Roccaforte, Fabrizio ^a   Di Franco, Salvatore ^a   Raineri, Vito ^a   Bonanno, Giovanni ^b  

^a CNR IMM   (Italy)

^b INAF OSSERVATORIO ASTROFISICO DI CATANIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; QUANTUM EFFICIENCY; RADIATION EFFECTS; SENSITIVITY ANALYSIS; SILICON CARBIDE; ULTRAVIOLET RADIATION;

DARK CURRENTS; PINCH-OFF SURFACE EFFECTS; SCHOTTKY UV PHOTODIODES; ULTRAVIOLET-VISIBLE REJECTION RATIO;

PHOTODIODES;

EID: 33748098689     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2337861     Document Type: Article

References (19)

1. E. Monroy, F. Omnes, and F. Calle, Semicond. Sci. Technol. 18, R33 (2003).
2. X. Chen, W. Yang, and Z. Wu, Microelectron. Eng. 83, 104 (2006).
3. Y. A. Goldberg, Semicond. Sci. Technol. 14, R41 (1999).
4. M. Badila, G. Brezeanu, J. Millan, P. Godignon, M. L. Locatelli, J. P. Chante, A. Lebedev, P. Lungu, G. Dinca, V. Banu, and G. Banoiu, Diamond Relat. Mater. 9, 994 (2000).
5. F. Yan, Xiaobin Xin, Shahid Aslam, Yuegang Zhao, David Franz, Jian H. Zhao, and Maurice Weiner, IEEE J. Quantum Electron. 40, 1315 (2004).
6. T. V. Blank, Yu. A. Goldberg, E. V. Kalinina, O. V. Konstantinov, A. O. Konstantinov, and A. Hallen, Semicond. Sci. Technol. 20, 710 (2005).
7. X. Xin, F. Yan, T. W. Koeth, C. Joseph, J. Hu, J. Wu, and J. H. Zhao, Electron. Lett. 41, 1192 (2005).
8. A. Itoh, T. Kimoto, and H. Matsunami, IEEE Electron Device Lett. 16, 280 (1995).
9. V. Saxena, J. N. Su, and A. J. Steckl, IEEE Trans. Electron Devices 46, 456 (1999).
10. J. H. Weaver, Phys. Rev. B 11, 1416 (1975).
11. M. L. Theye, Phys. Rev. B 2, 3060 (1970).
12. J. Wei, Cryst. Res. Technol. 41, 186 (2006).
13. Y. Z. Chiou, Jpn. J. Appl. Phys., Part 1 43, 2432 (2004).
14. F. Roccaforte, F. La Via, V. Raineri, L. Calcagno, P. Musumeci, and G. G. Condorelli, Appl. Phys. A: Mater. Sci. Process. 77, 827 (2002).
15. F. Roccaforte, F. La Via, V. Raineri, R. Pierobon, and E. Zanoni, J. Appl. Phys. 93, 9137 (2003).
16. S. M. Sze, Physics of Semiconductor Devices (Wiley, New York, 1992).
17. B. E. A. Saleh and M. C. Teich, Fundamental of Photonics (Wiley, New York, 1991).
18. Z. Wu, Mater. Sci. Forum 457-460, 1491 (2004).
19. J. C. Carrano, J. Appl. Phys. 83, 6148 (1998).