Copper phthalocyanine suspended gate field effect transistors for NO2 detection

Sensors and Actuators, B: Chemical

Volumn 118, Issue 1-2, 2006, Pages 249-254

  Oprea, A ^a   Weimar, U ^a   Simon, E ^b   Fleischer, M ^b   Frerichs, H P ^c   Wilbertz, Ch ^c   Lehmann, M ^c  

^a UNIVERSITY OF TÜBINGEN   (Germany)

^b SIEMENS AG   (Germany)

^c Micronas GmbH Freiburg   (Germany)

Author keywords

Copper phthalocyanine; Flip chip technology; Kelvin probe; NO2 sensor; Suspended gate field effect transistor

Indexed keywords

CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; COPPER COMPOUNDS; FLIP FLOP CIRCUITS; NITROGEN OXIDES; SENSITIVITY ANALYSIS;

COPPER PHTHALOCYANINE; FLIP-CHIP TECHNOLOGY; KELVIN PROBE; NO2 SENSORS; SUSPENDED GATE FIELD EFFECT TRANSISTOR (SGFET);

GATES (TRANSISTOR);

EID: 33747845272     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.04.054     Document Type: Article

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