Silicon micromachined sensor for gas detection

Materials Science and Engineering: B

Volumn 101, Issue 1-3, 2003, Pages 227-231

  Moldovan, Carmen ^a   Hinescu, Lavinia ^b   Hinescu, Mihail ^b   Iosub, Rodica ^a   Nisulescu, Mihai ^a   Firtat, Bogdan ^a   Modreanu, Mircea ^a   Dascalu, Dan ^a   Voicu, Victor ^b   Tarabasanu, Cornel ^c  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b Radiobiology Department   (Romania)

^c UNIVERSITY POLITEHNICA OF BUCHAREST   (Romania)

Author keywords

Gas sensor; Micromachining technique; Phtalocyanines

Indexed keywords

CHEMICAL SENSORS; DEPOSITION; ENERGY UTILIZATION; EVAPORATION; MICROMACHINING; MICROSENSORS; MOS CAPACITORS; VACUUM;

GAS DETECTION; PHTALOCYANINES;

SILICON SENSORS;

EID: 12144285833     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00668-2     Document Type: Conference Paper

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