Atomic-scale observation and control of the reaction of phosphine with silicon

e-Journal of Surface Science and Nanotechnology

Volumn 4, Issue , 2006, Pages 609-613

  Schofield, S R ^a,c   Curson, N J ^a   Simmons, M Y ^a   Warschkow, O ^b   Marks, N A ^b   Wilson, H F ^b   McKenzie, D R ^b   Smith, P V ^c   Radny, M W ^c  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b UNIVERSITY OF SYDNEY   (Australia)

^c UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

Density functional calculations; Phosphine; Scanning tunneling microscopy; Silicon; Surface chemical reaction

Indexed keywords

ADSORPTION; DIFFUSION; DIMERS; DISSOCIATION; HYDROGEN; LITHOGRAPHY; PHOSPHORUS COMPOUNDS; REACTION KINETICS; SCANNING TUNNELING MICROSCOPY;

DENSITY FUNCTIONAL CALCULATIONS; HEMIHYDRIDE DIMERS; PHOSPHINE; SURFACE CHEMICAL REACTION;

SILICON;

EID: 33747840680     PISSN: 13480391     EISSN: 13480391     Source Type: Journal    
DOI: 10.1380/ejssnt.2006.609     Document Type: Article

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