Proposals for producing novel periodic structures on silicon by ion bombardment sputtering

Vacuum

Volumn 81, Issue 1, 2006, Pages 138-140

  Carter, G ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

Circular overlapped ripple patterns; Multiple ion fluxes; Rotating targets; Sputtering; Superimposed ripple patterns

Indexed keywords

FLUXES; ION BOMBARDMENT; LIGHT INTERFERENCE; SPUTTER DEPOSITION; SURFACE PHENOMENA;

AZIMUTHAL ANGLE; ION BOMBARDMENT SPUTTERING; ION FLUX; SURFACE STRUCTURES;

SILICON;

EID: 33747352984     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.02.015     Document Type: Article

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